Chemical Management Systems
The Sigma Series is NexChem's modular chemical management platform designed to safely store, deliver, meter, distribute, and collect process chemistries across wet processing environments. Built for semiconductor, advanced packaging, MEMS, and precision manufacturing facilities, Sigma systems provide scalable chemical infrastructure — from compact single-drum configurations to multi-drum and tote-based supply platforms.
Chemical delivery systems, pressurized and non-pressurized
Chemical return & collection systems
Dual-drum changeover configurations
Multi-drum bulk platforms
Tote-based supply systems
Carboy-fed specialty chemistries
Integrated valve box distribution
Metering pump skids
Each system is engineered to align with facility standards, process flow, and automation requirements.
Sigma-100
Simple. Compact. Single Chemistry.
The Sigma-100 is engineered for labs, universities, and single-tool setups that require clean and dependable chemical delivery. Supporting one 55-gallon drum or carboy, it delivers straightforward automation and essential safety protections in a compact footprint.
Single 55-gallon drum
Carboys / small vessels
Sigma-200
Dual-Drum or Single Tote Capacity. More Volume, More Flexibility.
The Sigma-200 expands capacity with support for dual 55-gallon drums or a single 260–330 gallon chemical tote. Ideal for multi-module wet benches and growing fabs, it can manage one or two chemistries with simple, clean automation.
Single or dual drums
One chemical tote (260–330 gallons)
Optional carboy inputs
Sigma-300
High Volume. Multi-Chemistry. Fab-Ready.
The Sigma-300 is built for high-volume production, centralized chemical rooms, and multi-tool distribution networks. It handles totes, dual-tote switchovers, drums, and carboys, supporting multiple chemistries with the highest capacity in the Sigma family.
Single or dual totes
Drums and carboys
Multi-chemistry configurations
System Components & Options
Explore the modular components that make up the Sigma Series ecosystem.
Point-of-Use Chemical Routing with Manual or Automated Valves. Sigma Valve Boxes provide clean, organized, and reliable chemical distribution at the point of use. Designed for acids, bases, and solvents, each valve box can be configured with a mix of manual isolation valves and air-operated valves (AOVs) and integrates seamlessly with tool PLCs and facility interlocks. Whether feeding a single wet bench or multiple stations across a bay, Sigma Valve Boxes extend the Sigma chemical management platform directly to the production floor.
Sigma Lift Stations provide controlled transfer of chemical waste, rinse water, solvents, or process effluent from local collection points to facility drain systems or remote waste tanks. Built for acids, bases, and solvents, each lift station includes automated pump operation, level monitoring, and integrated safety features. Designed to complement the Sigma Chemical Management Systems, these stations create a complete, end-to-end routing and return solution.
Sigma Metering Systems deliver accurate, repeatable chemical dosing for spiking, blending, and controlled delivery. Designed for acids, bases, and solvents, they integrate directly with Sigma CMS platforms for clean, recipe-driven operation.
Compact chemical storage for direct dosing. Sigma Reservoir Modules provide clean, organized storage for 1-gallon bottles or 5–15 gallon onboard reservoirs, feeding Sigma Metering Pumps for direct bath spiking. These modules integrate seamlessly with wet benches to support acids, bases and solvents.
- Scalable from R&D to full production
- Automated transfer from drums, totes, or carboys
- Cleanroom-safe FM-4910 or stainless-steel construction
- Integrated containment & leak monitoring
- Simple PLC/HMI interface for real-time status
Ready to configure your Sigma Series?
Submit a Request for Quote to start a conversation with our application engineers. We'll help you find the right configuration for your specific process needs.